JPS61115954U - - Google Patents
Info
- Publication number
- JPS61115954U JPS61115954U JP19900684U JP19900684U JPS61115954U JP S61115954 U JPS61115954 U JP S61115954U JP 19900684 U JP19900684 U JP 19900684U JP 19900684 U JP19900684 U JP 19900684U JP S61115954 U JPS61115954 U JP S61115954U
- Authority
- JP
- Japan
- Prior art keywords
- output
- frequency
- power generation
- controls
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims 1
- 238000010248 power generation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19900684U JPS61115954U (en]) | 1984-12-31 | 1984-12-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19900684U JPS61115954U (en]) | 1984-12-31 | 1984-12-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61115954U true JPS61115954U (en]) | 1986-07-22 |
Family
ID=30758526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19900684U Pending JPS61115954U (en]) | 1984-12-31 | 1984-12-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61115954U (en]) |
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1984
- 1984-12-31 JP JP19900684U patent/JPS61115954U/ja active Pending